Photo : The RF Plasma Generator System High-Speed Automatic Matching High Accuracy Plasma Generation High-Speed Automatic Matching High Accuracy Plasma Generation
To Features Specifications
Photo : The RF Plasma Generator System
RF Plasma Generator Developed with Radio Communications Technology.Customizable on Demand from a publication: Electronic Journal (june,2003)

Item 13.56 / 27.12MHz
Photo : 13.56/27.12MHz
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> Dimension
40.68 / 60MHz
Photo : 40.68/60MHz
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> Dimension
80 to 150MHz
Photo : 80 to 150MHz
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> Dimension
350 to 700MHz
Photo : 350 to 700MHz
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2.45GHz
Photo : 2.45GHz
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Frequency within 13.56MHz ± 1kHz
within 27.12MHz ± 1kHz
within 40MHz ± 1kHz
within 60MHz ± 1kHz
within 80MHz ± 1kHz
within 150MHz ± 1kHz
within 350MHz ± 3kHz
within 700MHz ± 3kHz
within 2.45GHz ± 245kHz
Rated Output 5kW 1kW 700W
Output Power Accuracy Within +/- 2% Within +/- 3% -
Output Power Range 0 to 5,000W (1W step) variable 0 to 1,000W (1W step) variable 10 to 700W (1W step) variable
Output Impedance 50 ohms (unbalanced)
Output Connector 7/16 DIN 39D 7/16DIN WX-20D
Load Mismatch Operation with Constant Reflecting Power at any Load Range Automatic Matching from VSWR = 18 or less to VSWR = 1.8 or less
Spurious Distortion -50dB or less -45dB or less -50dB or less
Main Characteristic Ripple content by percentage (When maximum output)
1% or less (50ohms loading)
Pulse Modulation
Built-in Palse Source, Period = 10 to 100 msec, Pulse Width = 1msec or more
Power Supply Voltage To Be Consulted to Meet Request (ex. AC200V, 3 Phases, in Japan)
Input Power 13kVA or less 14kVA or less 2.5kVA or less 3kVA or less
Cooling System Water Cooling
Dimensions (mm) 480W × 430H × 600D 480W × 250H × 600D 380W × 400H × 380D
Weight (kg) 70kg or Less 40kg or Less 60kg or Less
Remote Control Analog or Serial (RS232C) Serial (RS232C)
Operation Temperature Range 5 to 40 degrees C (Ambient Humidity = 35 to 90%) 10 to 40 degrees C (Ambient Humidity = 80% or less)
* Additional information is available. Feel free to request more detailed specifications.
* JRC is committed to meeting requests as far as possible in the design and production of various types of RF Plasma Generator Systems.




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